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Diamond has excellent properties such as wide band gap, high thermal conductivity, high breakdown field, high mobility value, high temperature resistance, acid and alkali resistance, corrosion resistance, radiation resistance, etc. It plays an important role in the applications of high-power, high-frequency, and high temperature electronic devices and is regarded as one of the most promising wide-bandgap semiconductor materials at present.
CSMH Diamond Wafer has excellent properties such as wide bandgap, high thermal conductivity, high breakdown field, high mobility value, high temperature resistance, acid and alkali resistance, corrosion resistance, radiation resistance, etc. It plays an important role in the applications of high-power, high-frequency, and high temperature electronic devices and is regarded as one of the most promising wide-bandgap semiconductor materials at present.
CMSH uses MPCVD equipment to achieve epitaxial growth of polycrystalline diamond material with a thickness of<10um on a 50.8 mm (2 inch) silicon-based gallium nitride HEMT. Scanning electron microscope and X-ray diffractometer were used to characterize the surface morphology, crystalline quality and grain orientation of the diamond film. The results showed that the surface morphology of the sample was relatively uniform, and the diamond grains basically showed (111) plane growth, with Higher crystal plane orientation. In the growth process, the etching of gallium nitride (GaN) by hydrogen plasma is effectively avoided, so that the characteristics of gallium nitride before and after diamond coating do not change significantly.
Femtosecond laser-based Time-Domain Thermoreflectance (TDTR) is one of the most advanced thermal characterization techniques for micro- and nanoscale materials. The TDTR system independently developed by CSMH enables the measurement of key thermal properties, including thermal conductivity, thermal diffusivity, interfacial thermal resistance, and thermal boundary conductance, for materials such as diamond, semiconductors, and metals.The system supports measurements of both bulk samples and thin-film structures with thicknesses ranging from tens of nanometers to several micrometers. It employs a non-contact measurement approach and can operate under ambient conditions or perform measurements through optical windows in a vacuum chamber.
MPCVD (microwave plasma chemical vapor deposition) is an advanced, high-performance system for synthesizing artificial diamond. CSMH’s self-developed MPCVD equipment enables high-quality growth of both single-crystal and polycrystalline diamond. The system supports microwave output frequencies ranging from 915 to 2450 MHz and can grow diamond films with sizes from 2-inch to 10-inch.
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